化学学报 ›› 2004, Vol. 62 ›› Issue (22): 2223-2227. 上一篇    下一篇

研究论文

锂磷氧氮(LiPON)薄膜电解质和全固态薄膜锂电池研究

刘文元, 傅正文, 秦启宗   

  1. 复旦大学化学系激光化学研究所, 上海市分子催化和功能材料重点实验室, 上海, 200433
  • 收稿日期:2004-03-01 修回日期:2004-07-22 出版日期:2004-11-28 发布日期:2014-02-17
  • 通讯作者: 秦启宗,E-mail:qzqin@fudan.ac.cn;Tel:021-65102777;Fax:021-65102777 E-mail:qzqin@fudan.ac.cn
  • 基金资助:
    国家自然科学基金(No.20203006)资助项目.

Studies on Lithium Phosphorous Oxynitride Electrolyte Thin Films and a New All-solid-state Thin Film Lithium Battery

LIU Wen-Yuan, FU Zheng-Wen, QIN Qi-Zong   

  1. Laser Chemistry Institute & Department of Chemistry, Shanghai Key Laboratory of Molecular Catalysts and Innovative Materials, Fudan University, Shanghai, 200433
  • Received:2004-03-01 Revised:2004-07-22 Online:2004-11-28 Published:2014-02-17

采用电子束热蒸发Li3PO4与氮等离子体辅助相结合的方法制备了含氮磷酸锂(LiPON)电解质薄膜,已测得该非晶态电解质薄膜在温度为300K时的离子导电率为6.0×10-7 S/cm,电子电导率低于10-10 S/cm,电化学稳定窗口为5.0V.以脉冲激光沉积法(PLD)制备的非晶态Ag0.5V2O5薄膜为阴极,真空热蒸发法制备的金属锂为阳极,LiPON薄膜为电解质,成功地制备了一个新的Li/LiPON/Ag0.5V2O5全固态薄膜锂电池.该电池以14μA/cm2电流充/放电时,首次放电容量达到62 μAh·cm-2·μm-1,10次循环后容量衰减缓慢,衰减率约为0.2%,循环寿命达到550次以上.

关键词: 薄膜, 电子束蒸发, LiPON, 固体电解质, 锂电池

Lithium phosphorous oxynitride (LiPON) electrolyte thin films have been fabricated by nitrogen plasma-assisted deposition coupled with electron-beam reactive evaporated Li3PO4 for the first time. This electrolyte thin film, deposited at the nitrogen plasma reactor power of 350 W, was found to be amorphous with the ionic conduction of 6.0×10-7 S/cm at 300 K and an electrochemical stable window of 5.0 V. By using the LiPON thin film, a new all-solid-state thin film lithium battery of Li/LiPON/Ag0.5V2O5 has been successfully prepared. The cathode thin film of Ag0.5V2O5 was fabricated using pulsed laser deposition (PLD), and the metallic lithium anode thin film was prepared via vacuum thermal evaporation. For Li/LiPON/Ag0.5V2O5 battery, the open circuit voltage was 3.0 V and the first discharge capacity was 62 μAh·cm-2·μm-1 at a current density of 14 μA/cm2. After the 10th cycle, the capacity fading was limited to about 0.2% per cycle and this battery could be cycled more than 550 cycles.

Key words: thin film, e-beam evaporation, LiPON, solid electrolyte, lithium battery