Acta Chimica Sinica ›› 1993, Vol. 51 ›› Issue (4): 341-345. Previous Articles     Next Articles

Original Articles

激光增强电沉积铜过程的研究

王旭红;周焕钧;郁祖湛   

  1. 复旦大学化学系
  • 出版日期:1993-04-15 发布日期:1993-04-15

A study of laser-enhanced electrodeposition process of copper

WANG XUHONG;ZHOU HUANJUN;YU ZUZHAN   

  • Online:1993-04-15 Published:1993-04-15

An electrodeposition process of copper under a laser beam was studied by using a rotating disk electrode. A laser beam results in local temperature rise at the electrode-soln. interface, this leads to: local pos. shift of rest potential, increase in exchange current i0 and charge transfer coefficient a, and strong microstirring which raises the limiting c.d. All these changes enhance electrodeposition rates, thus high-speed selective electroplating can be reached.

Key words: COPPER, ELECTRO-DEPOSITION, LASER RADIATION, ELECTRODE REACTION

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