Acta Chimica Sinica ›› 2013, Vol. 71 ›› Issue (02): 255-259.DOI: 10.6023/A12110874 Previous Articles     Next Articles



洪清华a, 刘雪锋a,b, 方云a,b   

  1. a 江南大学 化学与材料工程学院 无锡 214122;
    b 江南大学 食品胶体与生物技术教育部重点实验室 无锡 214122
  • 投稿日期:2012-11-05 发布日期:2012-12-25
  • 通讯作者: 刘雪锋
  • 基金资助:

    项目受国家自然科学基金(No. 21071065);教育部留学回国人员科研启动基金和江苏省高校“青蓝工程”资助.

Templated Fabrication of Periodic Array of Nanovoids and Its SERS Performance

Hong Qinghuaa, Liu Xuefenga,b, Fang Yuna,b   

  1. a School of Chemical and Material Engineering, Jiangnan University, Wuxi 214122;
    b The Key Laboratory of Food Colloids and Biotechnology, Ministry of Education, Jiangnan University, Wuxi 214122
  • Received:2012-11-05 Published:2012-12-25
  • Supported by:

    Project supported by the National Natural Science Foundation of China (No. 21071065), the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry, and Qinlan Project of Jiangsu Province.

A facile and scalable fabrication method of highly periodic array of nano-sized voids with large area (182 cm2) has been achieved by means of a template related 3-step procedure. A non-close packed (NCP) colloidal SiO2 array was fabricated by programmed spin-coating and in situ polymerization. The colloidal SiO2 arrays are embedded in a polymer matrix, and the spheres of the top layer protrude out of the film, forming a periodic surface. After being etched by HF aqueous solution, the first layer of SiO2 microspheres in the template were etched off and left behind a highly periodic hexagonal array of polymer nanovoids. The periodicity of the resulting polymer nanovoids array is the same as that of colloidal SiO2 arrays. The volume of nanovoid is as small as about 4.72 attoliter per void, and the density of voids can be as high as about 4.9×108 voids/cm2. The metallic nanovoids array could be fabricated by subsequent deposition of Cr and Au layers. The resulting array of metallic nanovoids could be used as surface-enhanced Raman scattering (SERS) active substrates with ultra-sensitivity and excellent reproducibility. The SERS performance of our nanovoids array was probed by benzenethoil. The SERS enhancement factor (EF) can be as high as in the order of 108~109 on average over 182 cm2. The mean relative standard deviation (RSD) of EF is in the range of 5.5% to 8.6% over 182 cm2 which indicates the reproducibility of the substrates is quite good. The methodology leverages the high uniformity of the spin-coated colloidal arrays and well-established physical vapor deposition techniques. The formation of nanovoids array with high periodicity over large areas could lead to important technological applications in nanoelectronics and sensors.

Key words: array of nano-sized voids, surface-enhanced Raman scattering, SERS active substrates, enhancement factor, reproducibility