He Aodong, Liu Bo, Song Zhitang, Feng Gaoming, Zhu Nanfei, Ren Jiadong, Wu Guanping, Feng Songling
2013, Vol. 71(08): 1111-1117
doi: 10.6023/A13030326
a State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences, Shanghai 200050;
b University of the Chinese Academy of Sciences, Beijing 100049, China;
c Semiconductor Manufacturing International Corporation, Shanghai 201203, China
