Synthesis of Two-dimensional Transition Metal Dichalcogenides with Chemical Vapor Deposition

doi:10.6023/A15030203

Acta Chim. Sinica ›› 2015, Vol. 73 ›› Issue (9): 895-901.DOI: 10.6023/A15030203 Previous Articles Next Articles

Special Issue: 非碳基二维材料

Review

化学气相沉积法合成二维过渡金属硫族化合物研究进展

许冠辰^a,b, 卢至行^a, 张琪^a, 邱海龙^a, 焦丽颖^a

a 清华大学化学系北京 100084;
b 山东大学化学与化工学院济南 250100

投稿日期:2015-03-24 发布日期:2015-06-02
通讯作者: 焦丽颖 E-mail:lyjiao@mail.tsinghua.edu.cn
基金资助:
项目受国家自然科学基金(Nos. 21322303, 51372134)、青年千人计划、清华大学自主科研基金以及清华-富士康纳米中心研究基金的资助.

Synthesis of Two-dimensional Transition Metal Dichalcogenides with Chemical Vapor Deposition

Xu Guanchen^a,b, Lu Zhixing^a, Zhang Qi^a, Qiu Hailong^a, Jiao Liying^a

a Department of Chemistry, Tsinghua University, Beijing 100084;
b School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100

Received:2015-03-24 Published:2015-06-02
Supported by:
Project supported by the National Natural Science Foundation of China (Nos. 21322303, 51372134), National Program for Thousand Young Talents of China, Tsinghua University Initiative Scientific Research Program and Tsinghua-Foxconn Nanotechnology Research Center Research Program.

Two-dimensional atomic crystals have recently drawn intense attentions due to their unique 2D planar structure, novel properties and attractive applications. In this review, we summarized the recent advances on the synthesis of 2D transition metal dichalcogenides (TMDCs) by chemical vapor deposition (CVD) with the emphasis on 2D MoS₂ and WS₂. We discussed the effects of various growth parameters on the synthesis of 2D MoS₂ and WS₂. We also covered the synthesis strategies for the growth of binary alloys and heterostructures based on MoX₂ and WX₂ (X＝S, Se). Finally, we discussed the challenges and opportunities for the CVD growth of 2D TMDCs.

Key words: chemical vapor deposition, transition metal dichalcogenides, two-dimensional atomic crystals

Cite this article

Xu Guanchen, Lu Zhixing, Zhang Qi, Qiu Hailong, Jiao Liying. Synthesis of Two-dimensional Transition Metal Dichalcogenides with Chemical Vapor Deposition[J]. Acta Chim. Sinica, 2015, 73(9): 895-901.

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化学气相沉积法合成二维过渡金属硫族化合物研究进展

Synthesis of Two-dimensional Transition Metal Dichalcogenides with Chemical Vapor Deposition

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