Single layer of 3-mercaptopropyltrimethoxysilane (KH-590) bearing -SH functional groups was assembled onto the hydroxylated surface of glass. The terminal-SH groups at the exposed surface were oxidized in situ into sulfonic acid groups. The acidity and net negative charge of the sulfonate surface promoste the hydrolysis and surface attachment of solvated titanium containing species to form TiO2 films. Characterization using XPS and AFM shows that the TiO2 films have excellent adherence, pore-free, and fine transparency.

Key words: COUPLING AGENTS, TITANIUM OXIDE, THIN FILMS, X-RAY PHOTOELECTRON SPECTROMETRY, SILANE