ZnO nanocrystallines with different morphologies have been prepared on unmodified ITO substrate by using a potentiostatic electrodeposition method. After the ITO substrate was pre-modified with ZnO nanoparticles, a transparent and highly oriented ZnO nanorod array with a diameter less than 30 nm has been successfully prepared by the electrochemical deposition. The obtained ZnO nanostructure was characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and transmission spectroscopy. The results indicate that the average diameter of ZnO nanorod is about 21 nm, and the size distribution is about 18～25 nm. The nanorods, growing along [001] direction, are perpendicularly oriented to the substrate. When the wavelength of incident light is over 400 nm, the ZnO nanorod array films show high optical transmission of above 95%.

Key words: ZnO nanorod array, electrodeposition, substrate, morphology