TiO2 film was deposited on the stainless seel substrate by using Sol- Gel mehod with Ti(OB4) as a precursor. The film was composed of anatase phase, and the thickness of the film was about 90nm. The interface diffsion and chemical reaction between TiO2 and sainless steel substrate took place during annealing treatment. An iron oxide interlayer was formed during thermal treatment. Fe element segregated from steel substrate and diffused into TiO2 film. With increasing annealing temperature, the thickness of iron oxide interlayer increased and the diffustion depth and concentration of Fe in TiO2 layer increased too. With the increasing of annealing time, the thickness of iron oxide interlayer increased little, but the concentration of iron in TiO2 layer increased greatly. The adsorption intensity of UV can be intensified significantly, and the main absorption peak shifted to higher wavenumber with increasing the annealing temperature and time, which resulted from the diffusion of Fe in TiO2 film and the interaction of iron and TiO2. Fe diffused into the crystalline lattice of TiO2 and changed the lattice parameters of TiO2 film, which resulted in the shift of wave number.

Key words: TITANIUM DIOXIDE, THIN FILMS, STAINLESS STEEL, SOL-GEL PROCESS, AUGER ELECTRON SPECTROMETRY, PHOTOCATALYST