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Density Functional Theory Study on Surface Reaction Mechanism of Atomic Layer Deposition of ZrO
2
on Si(100)-2×1
REN Jie
1,2
, CHEN Wei, LU Hong-Liang, XU Min, ZHANG Wei*
,1
Acta Chimica Sinica . 2006, (
11
): 1133 -1139 .
