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Research and Development of Chemical Mechanical Planarization for Ge
2
Sb
2
Te
5
He Aodong, Liu Bo, Song Zhitang, Feng Gaoming, Zhu Nanfei, Ren Jiadong, Wu Guanping, Feng Songling
Acta Chimica Sinica . 2013, (
08
): 1111 -1117 . DOI: 10.6023/A13030326
