溶液法制备柔性压阻式传感器的研究进展

doi:10.6023/A21080414

化学学报 ›› 2022, Vol. 80 ›› Issue (2): 214-228.DOI: 10.6023/A21080414 上一篇下一篇

综述

溶液法制备柔性压阻式传感器的研究进展

王雨柔, 王国琪, 李想, 尹君^*(), 朱剑^*()

南开大学材料科学与工程学院天津 300350

投稿日期:2021-08-31 发布日期:2021-12-28
通讯作者: 尹君, 朱剑

作者简介:

王雨柔, 本科毕业于中国海洋大学材料科学与工程学院, 现为南开大学材料科学与工程学院硕士研究生. 导师朱剑教授, 主要研究方向为低维纳米材料的可控制备及其在柔性纳米电子器件中的应用.

尹君, 南开大学材料科学与工程学院讲师. 2019年于清华大学物理系获得博士学位, 后在南开大学任教, 研究方向包括二维电子材料和二维半导体, 以及基于二维材料的光电器件或光电探测器的机理研究.

朱剑, 南开大学材料科学与工程学院教授. 2013年于美国密歇根大学安娜堡分校的化学工程专业获得博士学位, 之后在西北大学材料科学与工程系进行博士后研究. 2017年入选国家级青年人才项目, 并受聘于南开大学材料科学与工程学院. 主要研究方向为纳米材料的合成和组装, 并探索其在高性能复合材料、信息器件及能源器件方面的应用.

基金资助:
国家自然科学基金(51873088); 国家自然科学基金(12004195); 天津市自然科学基金(18JCZDJC38400); 天津市自然科学基金(20JCQNJC01820); 中国高等教育“111”项目(B18030); 南开大学中央高校基本科研业务费专项资金(63201061); 南开大学中央高校基本科研业务费专项资金(63211044)

Research Progress of Flexible Piezoresistive Sensors Prepared by Solution-Based Processing

Yurou Wang, Guoqi Wang, Xiang Li, Jun Yin(), Jian Zhu()

School of Materials Science and Engineering, Nankai University, Tianjin 300350, China

Received:2021-08-31 Published:2021-12-28
Contact: Jun Yin, Jian Zhu
Supported by:
National Natural Science Foundation of China(51873088); National Natural Science Foundation of China(12004195); Natural Science Foundation of Tianjin, China(18JCZDJC38400); Natural Science Foundation of Tianjin, China(20JCQNJC01820); “111” Project of China’s Higher Education(B18030); Fundamental Research Funds for the Central Universities from Nankai University(63201061); Fundamental Research Funds for the Central Universities from Nankai University(63211044)

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摘要/Abstract

柔性压阻式传感器具有结构简单、易于制备、检测范围广等优势, 在可穿戴电子器件领域中扮演着非常重要的角色. 在制备柔性压阻式传感器的众多方法中, 溶液法由于操作简单、反应条件温和、材料的适用性广泛、易于规模化制备等优势, 成为极具发展前景的制备工艺. 在此基础上, 如何进一步提高柔性压阻式传感器的力学与电学性能也成为研究者们更加关注的话题. 另外, 制备图案化、微型化、规模化的传感器阵列为柔性压阻式传感器的应用范围拓展了新的道路. 本综述首先介绍了柔性压阻式传感器的工作原理与性能指标, 同时讨论了其性能指标对传感器在实际应用中的影响. 随后, 简单介绍了其构成材料, 并通过梳理近年来溶液法制备柔性传感器的研究成果, 选取了几种典型的溶液法制备方法进行重点介绍, 指出其具备的优势及目前存在的问题. 最后, 对溶液法制备柔性传感器的发展方向进行总结与展望.

关键词: 可穿戴电子器件, 压阻式传感器, 柔性传感器, 性能指标, 溶液法

Flexible piezoresistive sensors have received great attention due to their simple structure, easy preparation, and wide range of detection, and played an indispensable role in the field of wearable electronics. Solution-based processing has emerged as one of the promising techniques for sensors with advantages of simple operation, mild reaction conditions, wide-material choices, and large-scale fabrication. Furthermore, the mechanical and electrical performances of these sensors have been continuously optimized by a range of approaches. In addition, it allows the patterning of large-area sensor arrays, which expand their practical applications. In this review, an overview of the working mechanism and performance metrics of piezoresistive sensors is provided with detailed explanations of their influences on real applications. Then, the materials used for sensors preparation are introduced. Subsequently, the recent research progress of flexible piezoresistive sensors fabricated by solution-based processing is summarized. Several important solution-based methods are compared to illustrate their advantages and challenges. This review is concluded with a prospect of future development in the field of flexible solution-processed sensors.

Key words: wearable electronics, piezoresistive sensor, flexible sensor, performance metrics, solution processing

引用此文

王雨柔, 王国琪, 李想, 尹君, 朱剑. 溶液法制备柔性压阻式传感器的研究进展[J]. 化学学报, 2022, 80(2): 214-228.

Yurou Wang, Guoqi Wang, Xiang Li, Jun Yin, Jian Zhu. Research Progress of Flexible Piezoresistive Sensors Prepared by Solution-Based Processing[J]. Acta Chimica Sinica, 2022, 80(2): 214-228.

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图/表 19

图1. 受蜘蛛关节启发的裂纹传感器[17]. (a)蜘蛛腿部关节敏感部位的结构; (b)工作原理示意图; (c)裂纹传感器照片及扫描电子显微镜(SEM)图片

Figure 1. Crack-based sensor inspired by the spider joints[17]. (a) Schematic of the sensitive parts with the spider joint; (b) working principle; (c) photographs and scanning electron microscope (SEM) images of the crack-based sensor

图2. 应变传感器和压力传感器工作原理示意图. (a) VN/CNTs杂交结构示意图; (b) VN/CNTs多层结构滑移示意图[27]; (c)压力传感器工作原理示意图[28]

Figure 2. Schematics of the working principle for strain and pressure sensors. (a) Schematic of VN/CNTs hybrid structure; (b) schematic of slip VN/CNTs multilayer structure[27]; (c) schematic of working principle for pressure sensors[28]

图3. 压阻式传感器性能指标. (a)柔性电子器件在拉伸下仍能保持良好的形貌[29]; (b)传感器分为不同的工作范围, 分别对应不同的线性度和GF[31]; (c)迟滞性曲线[32]; (d)循环稳定性测试; (e)响应时间测试[33]; (f, g)传感阵列对物体空间构型的检测[34]

Figure 3. The performance index of piezoresistive sensors. (a) Flexible electronic devices can maintain good morphology under stretching[29]; (b) the sensor is divided into different working ranges, corresponding to different linearity and GF[31]; (c) hysteresis curve of flexible sensor[32]; (d) cycle stability of flexible sensor; (e) response time of flexible sensor[33]; (f, g) detection of object spatial configuration by sensor array[34]

图4. 常见的柔性基板材料[1]

Figure 4. Flexible substrate materials[1]

图5. 一维和二维材料用于柔性传感器的制备. (a) SPIS传感器制造工艺和工作原理的示意图[36]; (b)基于MXene/BP的压力传感器的结构及工作原理示意图[37]

Figure 5. One-dimensional and two-dimensional materials used in the preparation of flexible sensors. (a) Schematic depiction of the SPIS sensor fabrication process and working mechanism[36]; (b) structure and operating principle of MXene/BP-based pressure sensor[37]

图6. 导电聚合物和液态金属用于柔性传感器的制备. (a)拉伸机理及有源矩阵应变传感阵列照片[38]; (b)传感器用于穿戴式身体状况传感器系统[39]

Figure 6. Conductive polymers and liquid metals used in the preparation of flexible sensors. (a) Stretching mechanism and image of active-matrix transistor strain sensor array[38]; (b) tilt sensor used in wearable body condition sensor system[39]

图7. 共混法制备PINF/MXene气凝胶压阻式传感器[45]. (a)制备过程示意图; (b)传感器的传感机理示意图

Figure 7. PINF/MXene aerogel piezoresistive sensor prepared by co-blend[45]. (a) Schematic of the preparation process; (b) schematic of working mechanism

图8. CB/dPDMS复合材料结构及工作机制示意图[46]. (a)类液体流动的特性; 初始状态(b)以及拉伸重构状态(c)下的应变传感机制; (d)自修复机制; (e)回收机制

Figure 8. Schematic of CB/dPDMS composites structure and working mechanism[46]. (a) Liquid-like property; sensing mechanism in initial state (b) and reconstruction state (c); (d) self-repair mechanism; (e) recovery mechanism

图9. 旋涂法制备的双功能压阻式传感器[51]. (a)制备流程示意图; (b)传感器示意图及(c)照片; AgNPs薄层的表面(d)及截面(e) SEM的图片

Figure 9. Dual-function piezoresistive sensor prepared by spin- coating[51]. (a) Schematic of preparation process; schematic (b) and images (c) of the sensor; SEM images of surface (d) and cross section (e) for the AgNPs thin layer

图10. 滴涂法制备厚度梯度的压阻式传感器[52]. (a) SWCNTs薄膜制备示意图; (b)薄膜厚度; (c, d)薄膜表面显微镜照片; (e)薄膜表面褶皱“波长”; (f, g)拉伸性和循环稳定性; (h)灵敏度

Figure 10. Preparation of thickness-gradient piezoresistive sensor by drop-casting[52]. (a) Preparation of SWCNTs film; (b) thickness of the film; (c, d) micrographs of film surface; (e) the wrinkle wavelength of the film surface; (f, g) stretchability and cycle stability; (h) GF

图11. 刮涂法制备基于石墨烯的压阻式传感器[26]. (a)制备流程示意图; (b)拉伸照片; (c)共形贴合照片; (d)显微镜照片; 电阻变化率(e)以及GF (f)随拉伸的变化曲线

Figure 11. Preparation of graphene-based piezoresistive sensor by bar-coating[26]. (a) Schematic of preparation process; (b) images of the sensor stretched; (c) images of the sensor attached conformally; (d) the microscope image; the resistance change rate (e) and GF (f) as a function of applied strain

图12. 喷涂法制备压阻式传感器[54]. (a)制备流程示意图; (b)不同压力下的原位截面SEM图片及微结构示意图; (c)电流变化率随压力的变化曲线; (d)响应和回复时间; (e)循环稳定性

Figure 12. Preparation of piezoresistive sensor by spray-coating[54]. (a) Schematic of preparation process; (b) in-situ cross-sectional SEM images and microstructure diagrams under different pressure; (c) current change rate as a function of pressure; (d) the response and recovery time; (e) cycle stability

图13. 基于静电吸附的LbL制备柔性压阻式传感器. (a, c)制备过程示意图; (b)电阻变化率随弯曲应变的曲线[57]; (d) MXene片薄层在不同基板上的照片; 电阻变化率随弯曲曲率(e)和拉伸应变(f)变化曲线; (g, h) SEM图片[53]

Figure 13. Preparation of piezoresistive flexible sensor based on electrostatic adsorption by LbL assembly. (a, c) Schematic of preparation; (b) resistance change rate as a function of bending strain[57]; (d) images of MXene sheet assembled on various substrates; resistance change rate as a function of bending curvature (e) and of applied strain (f); (g, h) SEM images[53]

图14. 基于配体交换的LbL制备AgNPs导电薄膜[60]. (a) LbL制备流程示意图; (b) SEM图片; (c)面电阻及电导率随层数的变化关系

Figure 14. Preparation of AgNPs conductive film based on ligand exchange by LbL assembly[60]. (a) Schematic of LbL assembly; (b) SEM image; (c) sheet resistance and electrical conductivity as a function of n

图15. 直写打印制备柔性压阻式传感器[72]. (a)直写打印PDMS网络照片及示意图; (b) AgNPs被还原示意图

Figure 15. Preparation of piezoresistive flexible sensor by DIW[72]. (a) Image and schematic of PDMS network printed by DIW; (b) schematic of AgNPs were reduced

图16. 直写打印制备柔性压阻式传感器[73]. (a)直写打印装置示意图; (b)传感器的工作机制

Figure 16. Preparation of piezoresistive flexible sensor by DIW[73]. (a) Schematic of DIW device; (b) working mechanism of sensor

图17. 无电沉积法制备压阻型柔性传感器[80]. (a)制备流程示意图; (b) SEM图片; (c)电阻变化率随拉伸应变的变化曲线; (d, e)拉伸时的结构变化示意图

Figure 17. Preparation of piezoresistive flexible sensors by electroless deposition[80]. (a) Schematic of the preparation process; (b) SEM images; (c) resistance change rate as a function of applied strain; (d, e) schematic of the structural change under stretching

图18. 静电纺丝法制备基于压力的压阻型柔性传感器[81]. (a) AgNWs/GR/PANFs纳米网络结构示意图; (b)基于AgNWs/GR/PANFs的传感器照片; (c~e)传感器电极以及传感器敏感层制备示意图; (f)传感器工作机制

Figure 18. Preparation of pressure-based piezoresistive flexible sensors by electrostatic spinning[81]. (a) Structure diagram of AgNWs/GR/PANFs nano-network; (b) images of AgNWs/GR/PANFs sensor; (c~e) schematic of preparation for electrode and sensitive layer of sensor; (f) the working mechanism of the sensor

Methods	Conductive materials	Sensitivity (GF)	Range	Linearity	Response time	Cyclic stability	Ref.
co-blend	MWCNTs	0.34 kPa^-1 (10~100 kPa)	0~100 kPa	R²=0.998 (10~100 kPa)	48 ms (0~20 kPa)	1000 cycles (0~100 kPa)	[34]
Consecutive batch deposition (CBD)	AuNPs	126 (0%~0.63%)	0%~0.63%	Not known	16.1 ms	2000 bending cycles	[79]
Spin coating	AgNPs	10 (0%~24%) 71 (24%~32%), 550 (32%~36%)	0%~36%	Three consecutive linearity region	125 ms	Not known	[47]
Drop casting	CNTs	161 (ε<2%), 9.8 (2%<ε<15%), 0.58 (ε>15%)	0%~150%	Not known	Not known	100,000 cycles (ε=60%), 20,000 cycles (ε=100%)	[52]
Bar coating	Graphite	522.6 (50%)	0%~50%	Not known	Not known	Not known	[26]
Spray coating	MXene	151.4 kPa^-1 (0~4.7 kPa), 33.8 kPa^-1 (>4.7 kPa)	0~15 kPa	Two consecutive linearity region	<130 ms	10,000 cycles (0~3.36 kPa)	[54]
Screen printing	MXene- AgNWs- Nano- composite	220.8 (0%~5%), 560.5 (5%~27%), 930.5 (27%~53%), 1933.3 (53%~62%)	0%~62%	0.97 (0%~5%), 0.99 (5%~62%)	1.8 s	1000 cycles (0%~15%)	[31]
LbL assembly	AuNPs	17 (0%~3%)	0%~3%	Linearity (0%~3%)	Not known	Not known	[57]
LbL assembly	MXene	22.5 (40%)	0%~20%	Not known	Not known	2000 cycles (0%~20%)	[58]
DIW	AgNPs	≈10 (1%~5%) ≈53 (20%~30%)	0%~30%	Not known	Not known	Not known	[72]
DIW	Graphite	536.61 (0.32%~0.62%)	–0.6%~0.6%	Three consecutive linearity region	110 ms	10,000 cycles (–0.32%~0%, 0%~0.32%)	[66]
Electroless deposition	(PS@Ni@Au)MPs	56.8 (0%~5%) 14.28 (0%~40%)	0%~42%	Not known	Not known	2500 cycles (0%~15%)	[80]
Electrostatic spinning	AgNWs/ GR	134 kPa^-1 (0~1.5 kPa)	3.7 Pa~75 kPa	Three consecutive linearity region	<20 ms	8000 cycles (0~2 kPa)	[81]
Solvent evaporation	Ionic liquid	3.25 (0%~200%)	0%~200%	Linearity	Not known	22,503 cycles (0%~100%)	[75]

Methods	Conductive materials	Sensitivity (GF)	Range	Linearity	Response time	Cyclic stability	Ref.
co-blend	MWCNTs	0.34 kPa^-1 (10~100 kPa)	0~100 kPa	R²=0.998 (10~100 kPa)	48 ms (0~20 kPa)	1000 cycles (0~100 kPa)	[34]
Consecutive batch deposition (CBD)	AuNPs	126 (0%~0.63%)	0%~0.63%	Not known	16.1 ms	2000 bending cycles	[79]
Spin coating	AgNPs	10 (0%~24%) 71 (24%~32%), 550 (32%~36%)	0%~36%	Three consecutive linearity region	125 ms	Not known	[47]
Drop casting	CNTs	161 (ε<2%), 9.8 (2%<ε<15%), 0.58 (ε>15%)	0%~150%	Not known	Not known	100,000 cycles (ε=60%), 20,000 cycles (ε=100%)	[52]
Bar coating	Graphite	522.6 (50%)	0%~50%	Not known	Not known	Not known	[26]
Spray coating	MXene	151.4 kPa^-1 (0~4.7 kPa), 33.8 kPa^-1 (>4.7 kPa)	0~15 kPa	Two consecutive linearity region	<130 ms	10,000 cycles (0~3.36 kPa)	[54]
Screen printing	MXene- AgNWs- Nano- composite	220.8 (0%~5%), 560.5 (5%~27%), 930.5 (27%~53%), 1933.3 (53%~62%)	0%~62%	0.97 (0%~5%), 0.99 (5%~62%)	1.8 s	1000 cycles (0%~15%)	[31]
LbL assembly	AuNPs	17 (0%~3%)	0%~3%	Linearity (0%~3%)	Not known	Not known	[57]
LbL assembly	MXene	22.5 (40%)	0%~20%	Not known	Not known	2000 cycles (0%~20%)	[58]
DIW	AgNPs	≈10 (1%~5%) ≈53 (20%~30%)	0%~30%	Not known	Not known	Not known	[72]
DIW	Graphite	536.61 (0.32%~0.62%)	–0.6%~0.6%	Three consecutive linearity region	110 ms	10,000 cycles (–0.32%~0%, 0%~0.32%)	[66]
Electroless deposition	(PS@Ni@Au)MPs	56.8 (0%~5%) 14.28 (0%~40%)	0%~42%	Not known	Not known	2500 cycles (0%~15%)	[80]
Electrostatic spinning	AgNWs/ GR	134 kPa^-1 (0~1.5 kPa)	3.7 Pa~75 kPa	Three consecutive linearity region	<20 ms	8000 cycles (0~2 kPa)	[81]
Solvent evaporation	Ionic liquid	3.25 (0%~200%)	0%~200%	Linearity	Not known	22,503 cycles (0%~100%)	[75]

表1. 基于不同溶液法制备的传感器性能比较

Table 1. Comparison of performance index with sensors based on different solution-processed methods

表1. 基于不同溶液法制备的传感器性能比较

Table 1. Comparison of performance index with sensors based on different solution-processed methods

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溶液法制备柔性压阻式传感器的研究进展

Research Progress of Flexible Piezoresistive Sensors Prepared by Solution-Based Processing

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