ZrO
2在Si(100)-2×1表面原子层淀积反应机理的密度泛函理论研究
任杰,陈玮,卢红亮,徐敏,张卫
Density Functional Theory Study on Surface Reaction Mechanism of Atomic Layer Deposition of ZrO
2 on Si(100)-2×1
REN Jie
1,2, CHEN Wei, LU Hong-Liang, XU Min, ZHANG Wei*
,1
化学学报
.
2006, (11): 1133
-1139
.
