InAs nanocrystals embedded in SiO2 gel - glasses were prepared by a sol-gel method. The gels synthesized through the hydrolysis of a complex solution of Si(OC2H5)4, As2O3 and InCl3·4H2O were heated at 450℃ in O2 atmosphere, and then heated from 200 to 500℃ in H2 atmosphere to form fine cubic InAs crvstals. The size of InAs nanocrystals, determined from the line broadening of X - ray diffraction pattern, increases from 6 to 29 in diameter with heat - treatment temperature and molar ratio of InAs/SiO2 increasing. The InAs nanocrystal was found to be a polycrystal in the gel-glasses by electron diffraction pattern.

Key words: SOL-GEL PROCESS, MOSAIC TEXTURE, SILICON DIOXIDE, GLASS, INDIUM ARSENIDE, SEMICONDUCTOR, NANOPHASE MATERIALS, POLYCRYSTAL