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化学学报
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化学学报 ›› 2013, Vol. 71 ›› Issue (04): 657-662.DOI: 10.6023/A12121022 上一篇    下一篇

研究论文

纳米氧化锡修饰的微催化燃烧式氢气传感器的研制

刘西锋a,b, 董汉鹏a, 夏善红a   

  1. a 中国科学院电子学研究所 传感技术国家重点实验室 北京 100080;
    b 中国科学院大学 北京 100080
  • 投稿日期:2012-12-10 发布日期:2013-02-04
  • 通讯作者: 夏善红 E-mail:shxia@mail.ie.ac.cn
  • 基金资助:

    项目受国家自然科学基金(No. 61134010)和国家863计划(No. 2008AA042205)资助.

Micromachined Catalytic Combustible Hydrogen Gas Sensor Based on Nano-structured SnO2

Liu Xifenga,b, Dong Hanpenga, Xia Shanhonga   

  1. a State Key Laboratory of Transducer Technology, Institute of Electronics/Chinese Academy of Sciences, Beijing 100080;
    b Graduate University of Chinese Academy of Sciences, Beijing 100080
  • Received:2012-12-10 Published:2013-02-04
  • Supported by:

    Project supported by the National Natural Science Foundation of China (No. 61134010) and National High-tech R&D Program of China (No. 2008AA042205).

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被引次数

6

研制了一种基于多孔纳米氧化锡(SnO2)催化剂的微催化燃烧式气体传感芯片(Pellistor). 基于微机电系统(Micro- Electro-Mechanical Systems, MEMS)工艺制备硅基封闭膜式微催化燃烧式传感器, 通过气相沉积技术在Pt微加热电极和高温绝缘层表面制备三维纳米氧化锡催化膜, 利用催化膜对氢气良好的催化特性, 采用惠斯通电桥电路进行测量, 实现对空气环境中氢气在0～4%浓度范围内的快速检测, 响应时间和恢复时间分别达到0.65 s和2.32 s, 灵敏度达75.4 mV/1% H2, 线性度为99.4%. 考察200 天内该传感芯片对氢气的检测能力, 传感芯片表现出良好的稳定性, 精确度保持在95%以上. 在绝缘层高温性能稳定的条件下, 将三维纳米氧化锡应用于微催化燃烧式传感器的氢气检测, 对催化燃烧式传感器性能的改进具有重要的意义.

关键词: 纳米氧化锡, 催化燃烧传感器, 微机电系统(MEMS), 氢气检测

A new type of micro catalytic combustible gas sensor system was designed and fabricated using micro-electro mechanical system (MEMS) technology. A chemical vapor deposition (CVD) method is used to coat porous nano-crystalline SnO2 catalyst layer. Tin chloride anhydrate vapor was used as the precursor, and it reacted with ammonium sulfide [(NH4)2S] to form tin disulfide (SnS2) nanoparticles. The tin disulfide was dried up, annealed in air, then it transformed into polycrystalline SnO2 nanoparticles. The X-ray diffraction (XRD) measurement was used to investigate the structural properties of the SnO2 films. The morphology of the samples was investigated by field-emission scanning electron microscopy (FESEM). X-ray photoelectron spectroscopy (XPS) provided the information on chemical composition of the SnO2 films. The sensing elements and the reference elements were connected to a Wheatstone bridge circuit for the measurement of gas-sensing properties. The catalytic combustion sensor exhibited relatively higher sensitivity (75.4 mV/1% H2) and good linearity (99.4%) to H2 from 0 to 4% V/V. The response and recovery times to 4% H2 were 0.65 s and 2.32 s, respectively. Finally, the sensor signal was very stable during a 200 d long term operation (accuracy＞95%). It was noteworthy that the nano-structured SnO2 as catalyst film in a catalytic combustible gas sensor could considerably improve the performance of the gas sensor. It can be used in realizing portable sensing devices such as hydrogen analyzers and hydrogen leak monitors.

Key words: nano tin oxide, catalytic combustible gas sensor, micro-electro mechanical system (MEMS), hydrogen detection