The first three members of polytetramethylcyclo-p-silylphenylene silogane series i. e. the cyclic dimer, trimer and tetramer, have been obtained in 30~70% yields, from p-bis (dimethylethogysilyl) benzene or p-bis (dimethylchlorosilyl) benzene by means of hydrolysis in the presence of hydrochloric acid and ethyl ether. From m-bis (dimethylchlorosilyl) benzene only one cyclic dimer has been obtained indicating the great reluctance of m-silylphenylene-silogane to form larger cyclic structures.