角分辨飞行时间法研究GaAs(100)表面蚀刻反应动力学

卢平和,张抗战,郑企克,秦启宗

A kinetic study of chemical etching of GaAs(100) surface using angle-resolved TOF method

LU PINGHE;ZHANG KANGZHAN;ZHENG QIKE;QIN QIZONG

化学学报 . 1994, (2): 105 -110 .