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化学学报
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PCVD法制备ZrO~2和YSZ薄膜
喻维杰,张裕恒,彭定坤,孟广耀,曹传宝
ZrO~2 and YSZ thin films synthesized by microwave plasma CVD process
YU WEIJIE;ZHANG YUHENG;PENG DINGKUN;MENG GUANGYAO;CAO CHUANBAO
化学学报 . 1993, (12): 1164 -1169 .