Acta Chimica Sinica ›› 1984, Vol. 42 ›› Issue (2): 125-129. Previous Articles     Next Articles

Original Articles

半导体硅中电化学注锂的研究

彭瑞伍;丁永庆;李季龙   

  1. 中国科学院上海冶金研究所
  • 发布日期:1984-02-15

A study of electrochemical incorporation of Li into semiconductor Si

PENG RUIWU;DING YONGQING;LI JILONG   

  • Published:1984-02-15

Key words: SILICON, SEMICONDUCTOR MATERIAL, DOPE, LITHIUM, ELECTROCHEMICAL PROCESS

CLC Number: