A new bridged precursor of m-xylylene diureidopropyltriethoxysilane (m-XDUPTEOS) was firstly synthesized. Utilizing the mixture of the present new precursor and tetraethoxysilane (TEOS) as silica source, a series of polysilsesquioxane/SiO₂ hybrid sols have been obtained via adjusting molar ratio of both reagents, and then corresponding hybrid films have also been prepared by spinning-coating technique. The optical property, surface morphology and the thermal stability of these hybrid films were thoroughly studied by UV-Vis, AFM and TGA methods, respectively, indicating that these hybrid films all had smooth surface, fine thermal stability, excellent optical transmittance and moisture-proof ability.

Key words: sol-gel, bridged polysilsesquioxane, optical moisture-proof film