A Cu/TCNQ metal-organic thin film was prepared by vacuum deposition. The influence of humidity on chemical transport behavior in the film was studied. The results show that the transport is obviously accelerated by environmental humidity. The transport mechanism in the film in dry and wet air was essentially different. The CuTCNQ complex was formed respectively through solid chemical transport in dry environment and electrochemical reaction in aqueous solution in wet environment. The adsorption of H₂O molecules on the film is found to be the control step of the transport under the wet condition.

Key words: CuTCNQ, thin film, transport, humidity, electrochemical reaction