### 基于紫外光/臭氧化学改性-选择性化学镀的聚甲基丙烯酸甲酯表面区域金属化

1. 浙江大学化学系 微分析系统研究所 杭州 310058
• 投稿日期:2012-07-25 发布日期:2012-09-21
• 通讯作者: 陈恒武 E-mail:hwchen@zju.edu.cn
• 基金资助:

项目受国家自然科学基金(No. 20890020)和浙江省自然科学基金(No. Y4100254)资助.

### Region-selective Metalization of Poly(methylmethacrylate) Surface Based on UV/ozone Surface Modification

Hu Xianqiao, Jiang Yan, He Qiaohong, Shi Yangmeng, Hu Chenchen, Tang Ning, Chen Hengwu

1. Department of Chemistry, Institute of Microanalytical Systems, Zhejiang University, Zijin’gang Campus, Hangzhou 310058
• Received:2012-07-25 Published:2012-09-21
• Supported by:

Project supported by the National Natural Science Foundation of China (No. 20890020) and Provincial Natural Science Foundation of Zhejiang (No. Y4100254).

Poly(methylmethacrylate) (PMMA) has been widely used in the fields of optical instruments, aviation and auto industry, construction industry, advertising and decoration industry due to its optical transparency, low cost, low toxicity, and less fragile property. Recently it has been exploited to fabricate microfluidic chips. Region-selective metallization of PMMA surfaces are frequently required to improve the surface properties of PMMA and to integrate micro metal devices in PMMA microfluidic chips. This article presents our recent study on region-selective metalization of PMMA by means of UV/O3-based surface modification in combination of region-selective electroless plating. Deep UV-lights, ozone, and deep UV-lights in cooperation with ozone were compared with respect to the efficiency of hydrophilization of the PMMA surface. It was observed with water contact angle measurements that only synchronized deep UV and ozone treatment can turn the PMMA surface from hydrophobic to hydrophilic effectively. Attenuated total reflection fourier transform infrared spectra revealed that polar moieties such as carboxyl groups were generated on the UV/O3 treated areas. These polar moieties served as the anchors for further chemical reactions including amination of the carboxyl groups with ethylenediamine, adsorption of chloraurate anion onto the amine groups, and reduction of the Au(III) in the chloraurate anion to Au(0) by borohydride. These reactions led to the formation of the catalysis center of gold nano-particles on the UV-irradiated areas, which is indispensable for region-selective electroless plating. After optimization of the experimental conditions, a novel method for preparation of micro metal devices on PMMA surface has been established. With the printed poly(ethylene terephthalate) (PET) film serving as the primary photo mask, the achievable resolution of the prepared micro metal patterns was 50 μm or less. The deposited metal films adhered to the PMMA surface so strongly that they could hardly be tore off with adhesive tapes. Micro gold electrodes, micro gold electric heaters, micro copper electrodes, etc. were demonstrated to be prepared on PMMA surfaces, and their physical and electro-chemical properties were characterized.