Ge2Sb2Te5的化学机械抛光研究进展
何敖东, 刘波, 宋志棠, 冯高明, 朱南飞, 任佳栋, 吴关平, 封松林
Research and Development of Chemical Mechanical Planarization for Ge2Sb2Te5
He Aodong, Liu Bo, Song Zhitang, Feng Gaoming, Zhu Nanfei, Ren Jiadong, Wu Guanping, Feng Songling
化学学报 . 2013, (08): 1111 -1117 .  DOI: 10.6023/A13030326