Ge
2Sb
2Te
5的化学机械抛光研究进展
何敖东, 刘波, 宋志棠, 冯高明, 朱南飞, 任佳栋, 吴关平, 封松林
Research and Development of Chemical Mechanical Planarization for Ge
2Sb
2Te
5
He Aodong, Liu Bo, Song Zhitang, Feng Gaoming, Zhu Nanfei, Ren Jiadong, Wu Guanping, Feng Songling
化学学报
.
2013, (08): 1111
-1117
.
DOI: 10.6023/A13030326
