In situ mass spectroscopic investigation of the  pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during  MOCVD

Acta Chimica Sinica ›› 1997, Vol. 55 ›› Issue (6): 578-584. Previous Articles Next Articles

Original Articles

MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理质谱实时研究

桑文斌;K.Durose;A.W.Brinkman;J.Woods

上海大学嘉定校区无机材料系;Applied Physics Group, Department of Physics, Durham;University, South Road, Durham, DH1 3LE, UK

发布日期:1997-06-15

In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD

Sang Wenbin;K.Durose ;A.W.Brinkman ;J.Woods

Published:1997-06-15

Abstract

Pyrolysis properties of metallo-organic precursors, di- isopropyltelluride (DIPTe) and dimethylcadmium (DMCd), in a MOCVD reactor have been investigated by in-situ mass spectroscopy. In particular, possible gas phase reactions as well as pyrolysis mechanism are analysed. Interaction between the two precursors and its influence on pyrolysis temperature are explored under the CdTe, CdTe growth conditions.

Key words: MASS SPECTROGRAPHY, VAPOR PHASE DEPOSITION, MOCVD, SEMICONDUCTOR

CLC Number:

O627

Cite this article

Sang Wenbin;K.Durose ;A.W.Brinkman ;J.Woods. In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD[J]. Acta Chimica Sinica, 1997, 55(6): 578-584.

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MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理质谱实时研究

In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD

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MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理 质谱实时研究

In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD

PDF

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

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Metrics

Comments

MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理质谱实时研究