关键词: 氧化铝, 光致发光, 透射电子显微镜, 电解质, 罗丹明6G

Aluminum films of 500 ran thickness were evaporated on silicon substrate by electron beam technique. Then silicon-based porous anodic aluminum oxide films were prepared by anodization in traditional H_2SO_4, H_+3PO_4 and H_2C_2O_4, respectively. The structures of some samples were investigated by transmission electron microscopy (TEM) observation. It was found that photoluminescence (PL) spectra of the films prepared in various electrolytes presented different emission properties. Based on this result, another electrolyte, sulfosalicylic acid was used and a kind of laser dye, rhodamine 6G was also added in advance in H_2C_2O_4 solution to prepare Si-based alumina films. Both of them showed characteristic PL properties. According to previous theories of the PL mechanism of porous alumina, it has been suggested that luminescence centers of the alumina films, which usually originate from the F+ center, could be affected by the local structure related to the components incorporated in the films. Those species coining from the electrolyte will be responsible for the varied emissions.

Key words: ALUMINIUM OXIDE, PHOTOLUMINESCENCE, TEM, ELECTROLYTE, RHODAMINE-6G