MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理 质谱实时研究
桑文斌,K.Durose,A.W.Brinkman,J.Woods
In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD
Sang Wenbin;K.Durose ;A.W.Brinkman ;J.Woods
化学学报
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1997, (6): 578
-584
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