MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理质谱实时研究

桑文斌,K.Durose,A.W.Brinkman,J.Woods

In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD

Sang Wenbin;K.Durose ;A.W.Brinkman ;J.Woods

化学学报 . 1997, (6): 578 -584 .