化学学报 ›› 1997, Vol. 55 ›› Issue (6): 578-584. 上一篇    下一篇

研究论文

MOCVD过程中金属有机源(C~3H~7)~2Te和(CH~3)~2Cd热裂解机理 质谱实时研究

桑文斌;K.Durose;A.W.Brinkman;J.Woods   

  1. 上海大学嘉定校区无机材料系;Applied Physics Group, Department of Physics, Durham;University, South Road, Durham, DH1 3LE, UK
  • 发布日期:1997-06-15

In situ mass spectroscopic investigation of the pyrolysis mechanism of (C~3H~7)~2Te and (CH~3)~2Cd during MOCVD

Sang Wenbin;K.Durose ;A.W.Brinkman ;J.Woods   

  • Published:1997-06-15

采用质谱技术实时研究了金属有机源DIPTe和DMCd在MOCVD反应器中热裂解的性质。着重分析了可能发生的气相反应及热裂解机理,并探讨了在CdTe,HgCdTe实际生长条件下两个有机源之间可能发生的相互作用及其对热裂解温度的影响。

关键词: 质谱法, 气相沉积, 裂解机理, 金属有机, MOCVD, 半导体

Pyrolysis properties of metallo-organic precursors, di- isopropyltelluride (DIPTe) and dimethylcadmium (DMCd), in a MOCVD reactor have been investigated by in-situ mass spectroscopy. In particular, possible gas phase reactions as well as pyrolysis mechanism are analysed. Interaction between the two precursors and its influence on pyrolysis temperature are explored under the CdTe, CdTe growth conditions.

Key words: MASS SPECTROGRAPHY, VAPOR PHASE DEPOSITION, MOCVD, SEMICONDUCTOR

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