Titanium oxide thin films and nano-powders with photocatalytic activities were prepared via liquid-phase deposition (LPD) method by adding H3BO3 into an (NH4) 2TiF6 solution supersaturated with anatase nano-crystaUine TiO2 at 35 ℃. The effects of the deposition conditions on the structure, surface morphology, thickness and performance of the deposited TiO2 thin films and powder were studied by XRD, AFM, step profilometer, UV-Vis and BET methods. Photocatalytic activity of the TiO2 thin films and powder was evaluated by degradation of methylene blue. The results indicate, when molar ratio of TiF2-6-/H3BO3 was set at 1:2 ~ 1:4, anatase TiO2 was found in the prepared powder and the deposited thin films. Degradation of methylene blue reached its maximum for both thin films and powder calcined at 300 ℃, which was 5 times higher than that deposited at 35℃. The mechanism of the appearance of the strongest photocatalytic activity at 300 X, was also discussed.

Key words: SEDIMENTATION, PHOTOCATALYSIS, TITANIUM OXIDE, THIN FILMS, METHYLENUM CAERULEUM, (NH4) 2TiF6, BORIC ACID