Chin. J. Org. Chem. ›› 2000, Vol. 20 ›› Issue (5): 787-789. Previous Articles     Next Articles

多氟代季戊四芳醚的合成及其在低介电薄膜中的应用

周峥嵘;丁宗彪;王全瑞;李峰;陶凤岗;徐伟;夏炎;章壮健;华中一   

  1. 复旦大学化学系.上海(200433);复旦大学材料科学系.上海(200433)
  • 发布日期:2000-10-25

synthesis and applications of tetrapolyfluoroaryl ethers of pentaerythritol in lowering interlayer dielectric constants

Zhou Zhengrong;Ding Zongbiao;Wang Quanrui;Li Feng;Tao Fenggang;Xu Wei;Xia Yan;Zhang Zhuangjian;Hua Zhongyi   

  1. Fudan Univ, Dept Chem.Shanghai(200433);Fudan Univ, Dept of Material Sci.Shanghai(200433)
  • Published:2000-10-25

Six tetrapolyfluoroaryl ethers and thioether of pentaerythritol have been synthesized by reaction of phenylsulfonate ester of pentaerythritol with the corresponding phenols or thiophenol. some products have been found to be amenable to lower greatly the value of dielectric constant K to below 3 when doped to SiO~1 films.

Key words: ORGANO FLUORINE COMPOUNDS, PENTAERYTHRITOL P, FLUOROHYDROCARBON, THIN FILMS, FLUORINE, SILICON DIOXIDE, DOPE, DIELECTRIC CONSTANT

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