Studies on Lithium Phosphorous Oxynitride Electrolyte Thin Films and a New All-solid-state Thin Film Lithium Battery

Acta Chimica Sinica ›› 2004, Vol. 62 ›› Issue (22): 2223-2227. Previous Articles Next Articles

锂磷氧氮(LiPON)薄膜电解质和全固态薄膜锂电池研究

刘文元, 傅正文, 秦启宗

复旦大学化学系激光化学研究所, 上海市分子催化和功能材料重点实验室, 上海, 200433

投稿日期:2004-03-01 修回日期:2004-07-22 发布日期:2014-02-17
通讯作者: 秦启宗,E-mail:qzqin@fudan.ac.cn;Tel:021-65102777;Fax:021-65102777 E-mail:qzqin@fudan.ac.cn
基金资助:
国家自然科学基金(No.20203006)资助项目.

Studies on Lithium Phosphorous Oxynitride Electrolyte Thin Films and a New All-solid-state Thin Film Lithium Battery

LIU Wen-Yuan, FU Zheng-Wen, QIN Qi-Zong

Laser Chemistry Institute & Department of Chemistry, Shanghai Key Laboratory of Molecular Catalysts and Innovative Materials, Fudan University, Shanghai, 200433

Received:2004-03-01 Revised:2004-07-22 Published:2014-02-17

Abstract

Lithium phosphorous oxynitride (LiPON) electrolyte thin films have been fabricated by nitrogen plasma-assisted deposition coupled with electron-beam reactive evaporated Li₃PO₄ for the first time. This electrolyte thin film, deposited at the nitrogen plasma reactor power of 350 W, was found to be amorphous with the ionic conduction of 6.0×10^-7 S/cm at 300 K and an electrochemical stable window of 5.0 V. By using the LiPON thin film, a new all-solid-state thin film lithium battery of Li/LiPON/Ag_0.5V₂O₅ has been successfully prepared. The cathode thin film of Ag_0.5V₂O₅ was fabricated using pulsed laser deposition (PLD), and the metallic lithium anode thin film was prepared via vacuum thermal evaporation. For Li/LiPON/Ag_0.5V₂O₅ battery, the open circuit voltage was 3.0 V and the first discharge capacity was 62 μAh·cm^-2·μm^-1 at a current density of 14 μA/cm². After the 10th cycle, the capacity fading was limited to about 0.2% per cycle and this battery could be cycled more than 550 cycles.

Key words: thin film, e-beam evaporation, LiPON, solid electrolyte, lithium battery

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LIU Wen-Yuan, FU Zheng-Wen, QIN Qi-Zong. Studies on Lithium Phosphorous Oxynitride Electrolyte Thin Films and a New All-solid-state Thin Film Lithium Battery[J]. Acta Chimica Sinica, 2004, 62(22): 2223-2227.

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锂磷氧氮(LiPON)薄膜电解质和全固态薄膜锂电池研究

Studies on Lithium Phosphorous Oxynitride Electrolyte Thin Films and a New All-solid-state Thin Film Lithium Battery

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