Different nitrogen doped titanium dioxide (TiO₂) nanotube arrays were preformed by electrochemical anodization and wet chemical method by using ammonia, ethylenediamine, butylamine as nitrogen source respectively. The samples were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The relationship between nitrogen doping behavior and visible light photocatalytic property was studied by the experiment of degradation of hexachlorobenzen (HCB) wastewater. The result indicated that highly ordered TiO₂ nanotube arrays were grown on titanium substrates, the length of the tube was approximately 500 nm and the diameter was about 100 nm. The doping of N hindered the growth of crystalline particles and prevented the crystal of TiO₂ transferred from anatase to rutile. The photocatalytic experiments indicated that inorganic nitrogen was more conducive to let nitrogen access to TiO₂ lattice and substitute nitrogen had higher visible light photocatalytic activity than interstitial nitrogen.

Key words: TiO₂ nanotube array, N doped, photocatalysis, hexachlorobenzene