关键词: 表面, 铜络合物, 石英, 沉积, 热分解, 乙酰丙酮, 动力学研究

The kinetics of the thermal decomposition of Cu(acac)2 (Hacac = acetylacetone) on quartz substrate was studied. Heating of the substrate was accomplished with a CO2 laser beam. The deposition of a copper film by this process was dependent on the laser intensity and an intensity threshold was observed above which linear kinetics were determine The decomposition of Cu(acac)2 was first order. The rate controlling step was surface reaction on the substrate at low laser intensity and transport of precursor mols. at high laser intensity.

Key words: SURFACES, COPPER COMPLEX, QUARTZ, SEDIMENTATION, THERMAL DECOMPOSITION, ACETOPREPANONE, KINETIC STUDY