Acta Chimica Sinica
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Density Functional Theory Study on Surface Reaction Mechanism of Atomic Layer Deposition of ZrO2 on Si(100)-2×1
REN Jie1,2, CHEN Wei1, LU Hong-Liang1, XU Min1, ZHANG Wei*,1
(1 State Key Laboratory of Application Specific Integrated Circuits and System, Department of Microelectronics,
Fudan University, Shanghai 200433)
(2 College of Science, Hebei University of Science and Technology, Shijiazhuang 050018)

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