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化学学报
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化学学报 ›› 1993, Vol. 51 ›› Issue (12): 1164-1169. 上一篇    下一篇

研究论文

PCVD法制备ZrO~2和YSZ薄膜

喻维杰;张裕恒;彭定坤;孟广耀;曹传宝   

  1. 中国科学技术大学结构分析中心开放实验室;中国科学技术大学材料科学与工程系
  • 发布日期:1993-12-15

ZrO~2 and YSZ thin films synthesized by microwave plasma CVD process

YU WEIJIE;ZHANG YUHENG;PENG DINGKUN;MENG GUANGYAO;CAO CHUANBAO   

  • Published:1993-12-15

PDF

630

被引次数

32

以金属β-二酮类有机螯合物Zr(DPM)~4和Y(DPM)~3为挥发性源物质, 采用微波等离子体化学气相淀积法于较低的温度下(420～560℃)成功地在多孔α-Al~2O~3陶瓷,非晶玻璃等衬底上制备出致密的ZrO~2和YSZ薄膜材料.XRD分析结果表明,纯ZrO~2薄膜中除了单斜相外还存在着亚稳态的四方相.当掺入的Y~2O~3 摩尔百分含量大于或等于7%时,ZrO~2完全被稳定成立方相.SEM观察表明, 在等离子体内的不同区域中生成的薄膜形貌有所不同.XPS检测了YSZ薄膜中Zr3d~5~/~2和Zr3d~3~/~2 的电子结合能,发现较ZrO~2的标准值低0.7eV.由TEM观察和由XRD衍射峰半宽度计算, 所制备的ZrO~2和YSZ薄膜中微晶粒径在10nm左右

关键词: Ｘ射线衍射分析, 氧化锆, 薄膜, Ｘ射线光电子谱法, 等离子体, 氧化钇, 燃料电池, 气相沉积, 金属有机络合物, β-二酮类

Zirconia and yttria-stabilized zirconia (YSZ) thin films were successfully synthesized on a variety of substrates by microwave plasma CVD process, using beta-diketone chelates as volatile sources. The ZrO2 films contain monoclinic and tetragonal phases. In YSZ films, when Y2O3 content was less than 7 mol%, two phases were observed, namely cubic and monoclinic zirconia. When the Y2O3 content was >7 mol%, the film only had a cubic phase. TEM observation and XRD anal. showed that the ZrO2 and YSZ films consist of nanoscale crystallites of size ~10 nm. XPS anal. revealed that the Zr3d5/2 and Zr3d3/2 binding energies were lower than the standard values.

Key words: X-RAY DIFFRACTION ANALYSIS, ZIRCONIUM OXIDE, THIN FILMS, X-RAY PHOTOELECTRON SPECTROMETRY, PLASMAS, YTTRIUM OXIDE, FUEL CELLS, VAPOR PHASE DEPOSITION

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